Dry Test Methods for Micropumps

The test in the production of microfluidic devices dedicated to medical applications poses several challenges terms contamination, reliability, and cost. present article describes Design-for-Testability approach used make an insulin MEMS micropump that can be fully tested a few seconds. Each key functional parameter positive displacement with check valves is described together detailed pneumatic methods. typical failure modes device are considered experimentally show these methods also for analysis process control. A simplified Built-In-Self-Test presented. Finally, advanced characterize piezoelectric actuator tested.